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Yamanashi, JP
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last 30 patents
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Patent Grant
Inspection apparatus including power supply for supplying power to...
Patent number
11,774,488
Issue date
Oct 3, 2023
Tokyo Electron Limited
Shigeru Kasai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATU...
Publication number
20240402021
Publication date
Dec 5, 2024
TOKYO ELECTRON LIMITED
Tomohiro OTA
G01 - MEASURING TESTING
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Patent Application
POWER SUPPLY AND INSPECTION APPARATUS
Publication number
20220178988
Publication date
Jun 9, 2022
TOKYO ELECTRON LIMITED
Shigeru KASAI
H03 - BASIC ELECTRONIC CIRCUITRY