Fumiya KOBAYASHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 11,355,352
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Keiji Kitagaito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,707,091
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Keiji Kitagaito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,163,653
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Keiji Kitagaito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 9,390,935
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Maju Tomura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20220262646
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20200294812
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20190088497
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20160086817
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20150170932
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- H01 - BASIC ELECTRIC ELEMENTS