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Toyonaka, JP
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last 30 patents
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Patent Grant
Process and apparatus for making fine-scale patterns
Patent number
4,298,803
Issue date
Nov 3, 1981
Matsushita Electric Industrial Co., Ltd.
Shizuya Matsuura
B82 - NANO-TECHNOLOGY
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Patent Grant
Process for analyzing charged particles
Patent number
4,189,639
Issue date
Feb 19, 1980
Matsushita Electric Industrial Co., Ltd.
Yoshiaki Kai
G01 - MEASURING TESTING
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Patent Grant
Ion-beam etching method and an apparatus therefor
Patent number
4,101,772
Issue date
Jul 18, 1978
Matsushita Electric Industrial Co., Ltd.
Fumiya Konishi
H01 - BASIC ELECTRIC ELEMENTS