Fumiya TAKATA

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for plasma processing
- Patent number 11,594,398
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Yusuke Aoki
- B08 - CLEANING
Information Patent Grant
Etching method and plasma processing apparatus
- Patent number 11,569,094
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Kota Ishiharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,251,048
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Yusuke Aoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,062,882
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240162045
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240112927
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20230107264
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230086580
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230005753
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20220406613
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210305057
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Kota ISHIHARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200402805
- Publication date Dec 24, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PLASMA PROCESSING
- Publication number 20200266036
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200234925
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS

Fumiya TAKATA

Person

Patents Grantslast 30 patents

Apparatus and method for plasma processing

Etching method and plasma processing apparatus

Plasma processing method and plasma processing apparatus

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR PLASMA PROCESSING

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD