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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Projection optical system, exposure apparatus, and method of manufa...
Patent number
9,229,205
Issue date
Jan 5, 2016
Canon Kabushiki Kaisha
Fumiyasu Ono
G02 - OPTICS
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last 30 patents
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Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFA...
Publication number
20130050667
Publication date
Feb 28, 2013
Canon Kabushiki Kaisha
Fumiyasu ONO
G02 - OPTICS