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Diazodisulfones
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Patent number RE40211
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Issue date Apr 1, 2008
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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534 - Organic compounds
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Resist compositions
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Patent number 7,312,014
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Issue date Dec 25, 2007
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Wako Pure Chemical Industries Ltd.
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Tsuneaki Maesawa
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Sulfonium salt compounds
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Patent number 6,723,483
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Issue date Apr 20, 2004
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Wako Pure Chemical Industries, Ltd.
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Keiji Oono
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C07 - ORGANIC CHEMISTRY
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Resist composition
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Patent number 6,656,660
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Issue date Dec 2, 2003
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Sumitomo Chemical Company, Limited
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Fumiyoshi Urano
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Polymer and resist material
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Patent number 6,033,826
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Issue date Mar 7, 2000
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Polymer composition and resist material
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Patent number 5,976,759
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Issue date Nov 2, 1999
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Functional polymers
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Patent number 5,973,094
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Issue date Oct 26, 1999
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Pattern formation process
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Patent number 5,670,299
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Issue date Sep 23, 1997
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist material
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Patent number 5,627,006
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Issue date May 6, 1997
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Pattern formation method
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Patent number 5,558,976
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Issue date Sep 24, 1996
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist material
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Patent number 5,558,971
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Issue date Sep 24, 1996
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Anthracene derivatives
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Patent number 5,498,748
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Issue date Mar 12, 1996
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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C07 - ORGANIC CHEMISTRY
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Negative working resist composition
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Patent number 5,389,491
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Issue date Feb 14, 1995
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Matsushita Electric Industrial Co., Ltd.
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Yoshiyuki Tani
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Diazodisulfones
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Patent number 5,216,135
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Issue date Jun 1, 1993
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Wako Pure Chemical Industries, Ltd.
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Fumiyoshi Urano
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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