Fung Suong Ou

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Etterbeek, BE

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Patents Grantslast 30 patents

Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 11,180,850
- Issue date Nov 23, 2021
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 10,094,018
- Issue date Oct 9, 2018
- Lam Research Corporation
- Purushottam Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective atomic layer deposition for gapfill using sacrificial und...
- Patent number 10,037,884
- Issue date Jul 31, 2018
- Lam Research Corporation
- Fung Suong Ou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20190024233
- Publication date Jan 24, 2019
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION FOR GAPFILL USING SACRIFICIAL UND...
- Publication number 20180061628
- Publication date Mar 1, 2018
- LAM RESEARCH CORPORATION
- Fung Suong Ou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20170362705
- Publication date Dec 21, 2017
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20170096735
- Publication date Apr 6, 2017
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...