Fuping ZHANG

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Shutter device, method of controlling same, photolithography machin...
- Patent number 10,983,415
- Issue date Apr 20, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Zhiyong Jiang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Shutter device
- Patent number 10,928,704
- Issue date Feb 23, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yanfei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shutter device used for exposure in lithography machine, and method...
- Patent number 10,712,668
- Issue date Jul 14, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Menglai Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SHUTTER BLADE DEVICE FOR LITHOGRAPHY MACHINE
- Publication number 20200124939
- Publication date Apr 23, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yanfei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHUTTER DEVICE
- Publication number 20200103727
- Publication date Apr 2, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yanfei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHUTTER DEVICE, METHOD OF CONTROLLING SAME, PHOTOLITHOGRAPHY MACHIN...
- Publication number 20190391463
- Publication date Dec 26, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- ZHIYONG JIANG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SHUTTER DEVICE USED FOR EXPOSURE IN LITHOGRAPHY MACHINE, AND METHOD...
- Publication number 20190369501
- Publication date Dec 5, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Menglai CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY