Fuqiang YANG

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Reaction force diversion mechanism, motor device and photolithograp...
- Patent number 10,691,025
- Issue date Jun 23, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Baoliang Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography tool and method for compensating for surface defor...
- Patent number 10,345,720
- Issue date Jul 9, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yinlei Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
REACTION FORCE DIVERSION MECHANISM, MOTOR DEVICE AND PHOTOLITHOGRAP...
- Publication number 20190004433
- Publication date Jan 3, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Baoliang WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY TOOL AND METHOD FOR COMPENSATING FOR SURFACE DEFOR...
- Publication number 20180246412
- Publication date Aug 30, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yinlei WEI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY