Furman Y. Sorrell

Follow

Person

Cary, NC, US

People

Patents Grantslast 30 patents

Information Patent Grant
Three-zone rapid thermal processing system utilizing wafer edge hea...
- Patent number 5,418,885
- Issue date May 23, 1995
- North Carolina State University
- John R. Hauser
- C30 - CRYSTAL GROWTH
Information Patent Grant
Conical rapid thermal processing apparatus
- Patent number 5,253,324
- Issue date Oct 12, 1993
- North Carolina State University
- Jimmie J. Wortman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for controlling rapid thermal processing systems
- Patent number 5,155,337
- Issue date Oct 13, 1992
- North Carolina State University
- Furman Y. Sorrell
- G05 - CONTROLLING REGULATING