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Fusashige TOKUTAKE
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Sendai-shi, Miyagi, JP
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last 30 patents
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Patent Grant
Mn—Zn—W—O sputtering target and production method therefor
Patent number
10,886,112
Issue date
Jan 5, 2021
Dexerials Corporation
Junichi Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Mn-Zn-W-O SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR
Publication number
20180186699
Publication date
Jul 5, 2018
Dexerials Corporation
Junichi SUGAWARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...