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Fuzhong YANG
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Beijing, CN
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last 30 patents
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Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
Patent number
11,703,361
Issue date
Jul 18, 2023
BEIJING U-PRECISION TECH CO., LTD.
Ming Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
Patent number
11,525,673
Issue date
Dec 13, 2022
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
Patent number
11,307,018
Issue date
Apr 19, 2022
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Five-degree-of-freedom heterodyne grating interferometry system
Publication number
20220042792
Publication date
Feb 10, 2022
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM
Publication number
20210262834
Publication date
Aug 26, 2021
TSINGHUA UNIVERSITY
Ming ZHANG
G01 - MEASURING TESTING
Information
Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
Publication number
20210164772
Publication date
Jun 3, 2021
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING