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Gabriele Lechner
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Marktl, DE
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last 30 patents
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Patent Grant
Process for producing a semiconductor wafer
Patent number
6,416,393
Issue date
Jul 9, 2002
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Laszlo Fabry
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Process for producing a semiconductor wafer
Publication number
20010036797
Publication date
Nov 1, 2001
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG
Laszlo Fabry
B24 - GRINDING POLISHING