Gaku SHIMODA

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 9,865,471
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Gaku Shimoda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20160322230
- Publication date Nov 3, 2016
- TOKYO ELECTRON LIMITED
- Gaku SHIMODA
- H01 - BASIC ELECTRIC ELEMENTS