Gakuji Ohta

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Tokyo, JP

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Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060075972
- Publication date Apr 13, 2006
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020017363
- Publication date Feb 14, 2002
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...