TREA

Gaëlle ANTOUN

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  • Dardilly, FR
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 11,120,999
    • Issue date Sep 14, 2021
    • Tokyo Electron Limited
    • Koichi Yatsuda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20220102160
    • Publication date Mar 31, 2022
    • TOKYO ELECTRON LIMITED
    • Shigeru TAHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20200381264
    • Publication date Dec 3, 2020
    • TOKYO ELECTRON LIMITED
    • Koichi YATSUDA
    • H01 - BASIC ELECTRIC ELEMENTS