Ganesh BALASUBRAMANIAN

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Profile shaping for control gate recesses
- Patent number 12,211,908
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 12,106,958
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable delivery for semiconductor processing system
- Patent number 12,094,689
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chucking process and system for substrate processing chambers
- Patent number 12,020,911
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Bhaskar Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer de-chucking detection and arcing prevention
- Patent number 12,002,702
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ganesh Balasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatments for controlling deposition defects
- Patent number 11,894,228
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber with reduced plasma arc
- Patent number 11,875,969
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to improve adhesion and defects for tungsten carbide film
- Patent number 11,859,275
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-temperature chamber and chamber component cleaning and mainten...
- Patent number 11,837,448
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Shuran Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Profile shaping for control gate recesses
- Patent number 11,784,229
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 11,721,545
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber configurations and processes for particle control
- Patent number 11,670,492
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of seasoning electrostatic chucks with dielectr...
- Patent number 11,646,216
- Issue date May 9, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor metrology data integration
- Patent number 11,592,812
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Sidharth Bhatia
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of reducing chamber residues
- Patent number 11,560,623
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Liangfa Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma parameters and skew characterization by high speed imaging
- Patent number 11,545,376
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Sidharth Bhatia
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Graded dimple height pattern on heater for lower backside damage an...
- Patent number 11,515,191
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma density control on substrate edge
- Patent number 11,495,440
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucking process and system for substrate processing chambers
- Patent number 11,488,811
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Bhaskar Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer de-chucking detection and arcing prevention
- Patent number 11,437,262
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Ganesh Balasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 11,276,562
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming film stacks with reduced defects
- Patent number 11,145,504
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Zhijun Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
- Patent number 11,136,665
- Issue date Oct 5, 2021
- Applied Materials, Inc.
- Dale Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual temperature heater
- Patent number 11,133,210
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for removing contaminant particles in a plasm...
- Patent number 11,120,976
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote capacitively coupled plasma source with improved ion blocker
- Patent number 11,069,514
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Vivek B Shah
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...
- Publication number 20250116001
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Allison Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250118578
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ajith Karonnan Ramapurath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL INSPECTION OF WAFERS IN MANUFACTURING SYSTEMS
- Publication number 20250060321
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Elias Anthony Martinez
- G01 - MEASURING TESTING
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387174
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387190
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20230411462
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20230343586
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Anup Kumar SINGH
- B08 - CLEANING
Information Patent Application
CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
- Publication number 20230298870
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20230274968
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR METROLOGY DATA INTERGRATION
- Publication number 20230205196
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Sidharth Bhatia
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REDUCING CHAMBER RESIDUES
- Publication number 20230151487
- Publication date May 18, 2023
- Applied Materials, Inc.
- Liangfa HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENTS FOR CONTROLLING DEPOSITION DEFECTS
- Publication number 20230061249
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230048661
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Bhaskar KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION
- Publication number 20220415695
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Ganesh BALASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT FOR HIGH-TEMPERATURE CLEANS
- Publication number 20220384161
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...
- Publication number 20220344135
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Shuran SHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HELIUM-FREE SILICON FORMATION
- Publication number 20220336216
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Zeqiong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED CARBON ADHESION
- Publication number 20220293416
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CFX LAYER TO PROTECT ALUMINUM SURFACE FROM OVER-OXIDATION
- Publication number 20220178017
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Anup Kumar SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL
- Publication number 20220122823
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20220123114
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20220122872
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20220102141
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Anup Kumar SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
- Publication number 20220064797
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay DHANAKSHIRUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE
- Publication number 20220037126
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SWITCHABLE DELIVERY FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20220020570
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote Capacitively Coupled Plasma Source with Improved Ion Blocker
- Publication number 20210351020
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES TO IMPROVE ADHESION AND DEFECTS FOR TUNGSTEN CARBIDE FILM
- Publication number 20210108309
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Vivek Bharat SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ganesh BALASUBRAMANIAN

Person

Patents Grantslast 30 patents

Profile shaping for control gate recesses

Method of using dual frequency RF power in a process chamber

Switchable delivery for semiconductor processing system

Chucking process and system for substrate processing chambers

Wafer de-chucking detection and arcing prevention

PECVD process

Treatments for controlling deposition defects

Process chamber with reduced plasma arc

Techniques to improve adhesion and defects for tungsten carbide film

High-temperature chamber and chamber component cleaning and mainten...

Gas delivery systems and methods

Profile shaping for control gate recesses

Method of using dual frequency RF power in a process chamber

Treatment for high-temperature cleans

Chamber configurations and processes for particle control

Systems and methods of seasoning electrostatic chucks with dielectr...

PECVD process

Sensor metrology data integration

Methods of reducing chamber residues

Plasma parameters and skew characterization by high speed imaging

Graded dimple height pattern on heater for lower backside damage an...

Plasma density control on substrate edge

Chucking process and system for substrate processing chambers

Wafer de-chucking detection and arcing prevention

Plasma processing using multiple radio frequency power feeds for im...

Method of forming film stacks with reduced defects

Shadow ring for modifying wafer edge and bevel deposition

Dual temperature heater

Apparatus and methods for removing contaminant particles in a plasm...

Remote capacitively coupled plasma source with improved ion blocker

Patents Applicationslast 30 patents

ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...

PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM

OPTICAL INSPECTION OF WAFERS IN MANUFACTURING SYSTEMS

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

PROFILE SHAPING FOR CONTROL GATE RECESSES

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

SENSOR METROLOGY DATA INTERGRATION

PECVD PROCESS

METHODS OF REDUCING CHAMBER RESIDUES

TREATMENTS FOR CONTROLLING DEPOSITION DEFECTS

CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS

WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION

TREATMENT FOR HIGH-TEMPERATURE CLEANS

HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...

HELIUM-FREE SILICON FORMATION

SYSTEMS AND METHODS FOR IMPROVED CARBON ADHESION

CFX LAYER TO PROTECT ALUMINUM SURFACE FROM OVER-OXIDATION

CHAMBER CONFIGURATIONS AND PROCESSES FOR PARTICLE CONTROL

PROFILE SHAPING FOR CONTROL GATE RECESSES

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION

FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE

SWITCHABLE DELIVERY FOR SEMICONDUCTOR PROCESSING SYSTEM

Remote Capacitively Coupled Plasma Source with Improved Ion Blocker

GAS DELIVERY SYSTEMS AND METHODS

TECHNIQUES TO IMPROVE ADHESION AND DEFECTS FOR TUNGSTEN CARBIDE FILM