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Ganesh Rajagopalan
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Gilbert, AZ, US
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last 30 patents
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Patent Grant
Processes for curing silicon based low-k dielectric materials
Patent number
8,338,315
Issue date
Dec 25, 2012
Axcelis Technologies, Inc.
Darren L. Moore
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
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Patent Application
PROCESSES FOR CURING SILICON BASED LOW-K DIELECTRIC MATERIALS
Publication number
20090215282
Publication date
Aug 27, 2009
Axcelis Technologies, Inc.
Darren L. Moore
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...