Ganesh Sundaram

Person

Concord, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 10,249,491
- Issue date Apr 2, 2019
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 10,090,153
- Issue date Oct 2, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,960,036
- Issue date May 1, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,929,011
- Issue date Mar 27, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Atomic layer deposition head
- Patent number 9,783,888
- Issue date Oct 10, 2017
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD systems and methods
- Patent number 9,777,371
- Issue date Oct 3, 2017
- Ultratech, Inc.
- Roger R. Coutu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,768,016
- Issue date Sep 19, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,691,613
- Issue date Jun 27, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,666,432
- Issue date May 30, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for high-velocity and atmospheric-pressure atomic layer depo...
- Patent number 9,567,670
- Issue date Feb 14, 2017
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Forming Device Quality Gallium Nitride Lay...
- Publication number 20180226241
- Publication date Aug 9, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
Laser-Assisted Atomic Layer Deposition of 2D Metal Chalcogenide Films
- Publication number 20180216232
- Publication date Aug 2, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170256394
- Publication date Sep 7, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170250070
- Publication date Aug 31, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
- Publication number 20170213718
- Publication date Jul 27, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
Laser-assisted atomic layer deposition of 2D metal chalcogenide films
- Publication number 20170073812
- Publication date Mar 16, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
- Publication number 20160203972
- Publication date Jul 14, 2016
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20160155629
- Publication date Jun 2, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Head
- Publication number 20160115596
- Publication date Apr 28, 2016
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPO...
- Publication number 20150275363
- Publication date Oct 1, 2015
- Ultratech, Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD COATING SYSTEM
- Publication number 20120141676
- Publication date Jun 7, 2012
- Cambridge NanoTech Inc.
- Michael J. Sershen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD SYSTEMS AND METHODS
- Publication number 20120064245
- Publication date Mar 15, 2012
- Cambridge NanoTech Inc.
- Roger R. Coutu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECURSOR DELIVERY
- Publication number 20110311726
- Publication date Dec 22, 2011
- Cambridge NanoTech Inc.
- Guo Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ganesh Sundaram

Person

Patents Grantslast 30 patents

Method and apparatus for forming device quality gallium nitride lay...

Formation of heteroepitaxial layers with rapid thermal processing t...

Method and apparatus for forming device quality gallium nitride lay...

Formation of heteroepitaxial layers with rapid thermal processing t...

Atomic layer deposition head

ALD systems and methods

Formation of heteroepitaxial layers with rapid thermal processing t...

Formation of heteroepitaxial layers with rapid thermal processing t...

Method and apparatus for forming device quality gallium nitride lay...

Method for high-velocity and atmospheric-pressure atomic layer depo...

Patents Applicationslast 30 patents

Method and Apparatus for Forming Device Quality Gallium Nitride Lay...

Laser-Assisted Atomic Layer Deposition of 2D Metal Chalcogenide Films

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...

Laser-assisted atomic layer deposition of 2D metal chalcogenide films

METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

Atomic Layer Deposition Head

METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPO...

ALD COATING SYSTEM

ALD SYSTEMS AND METHODS

METHOD AND APPARATUS FOR PRECURSOR DELIVERY