Gang CHEN

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    HOTSPOT AWARE DOSE CORRECTION

    • Publication number 20180259858
    • Publication date Sep 13, 2018
    • ASML NETHERLANDS B.V.
    • Gang CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY