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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
12,163,219
Issue date
Dec 10, 2024
Lam Research Corporation
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
11,365,479
Issue date
Jun 21, 2022
Lam Research Corporation
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
10,760,158
Issue date
Sep 1, 2020
Lam Research Corporation
Damodar Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber conditioning for remote plasma process
Patent number
10,211,099
Issue date
Feb 19, 2019
Lam Research Corporation
Deqi Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for tuning a receiver by iteratively dividing a f...
Patent number
9,148,188
Issue date
Sep 29, 2015
Marvell International Ltd.
Songping Wu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
System and method for non-crystal-based communications
Patent number
8,571,142
Issue date
Oct 29, 2013
Marvell International Ltd.
Songping Wu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
RF-AGC scheme insensitive to channel interference and deep fading
Patent number
8,050,643
Issue date
Nov 1, 2011
Marvell International Ltd.
Songping Wu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
EDGE RINGS FOR IMPROVED EDGED UNIFORMITY IN SEMICONDUCTOR PROCESSIN...
Publication number
20250014938
Publication date
Jan 9, 2025
LAM RESEARCH CORPORATION
Anand Chandrashekar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING
Publication number
20240376598
Publication date
Nov 14, 2024
LAM RESEARCH CORPORATION
Jasmine LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REDUCING LINE BENDING DURING METAL FILL PROCESS
Publication number
20240158913
Publication date
May 16, 2024
LAM RESEARCH CORPORATION
Anand Chandrashekar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20230122846
Publication date
Apr 20, 2023
LAM RESEARCH CORPORATION
Rohit KHARE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20230002891
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BACKSIDE REACTIVE INHIBITION GAS
Publication number
20220415711
Publication date
Dec 29, 2022
LAM RESEARCH CORPORATION
Gang LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20220275504
Publication date
Sep 1, 2022
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN FEATURE FILL WITH INHIBITION CONTROL
Publication number
20220172987
Publication date
Jun 2, 2022
LAM RESEARCH CORPORATION
Tsung-Han Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING SYSTEM FOR REMOVING DEPOSITS FROM PUMP IN AN EXHAUST OF A...
Publication number
20210257194
Publication date
Aug 19, 2021
LAM RESEARCH CORPORATION
Krishna BIRRU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20200347497
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20190326168
Publication date
Oct 24, 2019
Novellus Systems, Inc.
Tsung-Han Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20190185999
Publication date
Jun 20, 2019
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER CONDITIONING FOR REMOTE PLASMA PROCESS
Publication number
20180174901
Publication date
Jun 21, 2018
LAM RESEARCH CORPORATION
Deqi Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20170365513
Publication date
Dec 21, 2017
LAM RESEARCH CORPORATION
Tsung-Han Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low-voltage memory having flexible gate charging element
Publication number
20090121273
Publication date
May 14, 2009
Tsu-Jae King
H01 - BASIC ELECTRIC ELEMENTS