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Gang Shu
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Rockport, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for spatially resolved optical metrology of an io...
Patent number
11,380,517
Issue date
Jul 5, 2022
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for spatially resolved optical metrology of an io...
Patent number
10,699,871
Issue date
Jun 30, 2020
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Angular control of ion beam for vertical surface treatment
Patent number
10,535,522
Issue date
Jan 14, 2020
Varian Semiconductor Equipment Associates, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...
Publication number
20200273661
Publication date
Aug 27, 2020
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...
Publication number
20200152417
Publication date
May 14, 2020
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS