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Garrett Ho Yee Sin
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Endpoint method using peak location of modified spectra
Patent number
8,202,738
Issue date
Jun 19, 2012
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
SELECTION OF POLISHING PARAMETERS TO GENERATE REMOVAL PROFILE
Publication number
20120277897
Publication date
Nov 1, 2012
Huanbo Zhang
G05 - CONTROLLING REGULATING
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Patent Application
Endpoint Method Using Peak Location Of Modified Spectra
Publication number
20110275167
Publication date
Nov 10, 2011
Jeffrey Drue David
B24 - GRINDING POLISHING