Garry K. Kwong

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Temperature regulation in a CMP process
- Patent number 6,000,997
- Issue date Dec 14, 1999
- Aplex, Inc.
- Shu-Hsin Kao
- B24 - GRINDING POLISHING
Information Patent Grant
Modular wafer polishing apparatus and method
- Patent number 5,957,764
- Issue date Sep 28, 1999
- Aplex, Inc.
- H. Alexander Anderson
- B24 - GRINDING POLISHING