Gary A. Patrizi

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Albuquerque, NM, US

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Patents Grantslast 30 patents

Information Patent Grant
MEMS packaging with etching and thinning of lid wafer to form lids...
- Patent number 8,597,985
- Issue date Dec 3, 2013
- Sandia Corporation
- Rajen Chanchani
- B81 - MICRO-STRUCTURAL TECHNOLOGY