Gary B. Powell

Person

Petaluma, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,580,119
- Issue date Aug 25, 2009
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,456,939
- Issue date Nov 25, 2008
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and device utilizing plasma source for real-time gas sampling
- Patent number 7,202,946
- Issue date Apr 10, 2007
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,072,028
- Issue date Jul 4, 2006
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and device utilizing plasma source for real-time gas sampling
- Patent number 7,019,829
- Issue date Mar 28, 2006
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Inductively coupled plasma spectrometer for process diagnostics and...
- Patent number 6,867,859
- Issue date Mar 15, 2005
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and device utilizing plasma source for real-time gas sampling
- Patent number 6,791,692
- Issue date Sep 14, 2004
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and device utilizing real-time gas sampling
- Patent number 6,757,061
- Issue date Jun 29, 2004
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and device utilizing real-time gas sampling
- Patent number 6,538,734
- Issue date Mar 25, 2003
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Grant
Parallel plate reactor and method of use
- Patent number 5,209,803
- Issue date May 11, 1993
- Matrix Integrated Systems, Inc.
- Gary B. Powell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching with parallel plate reactor having a grid
- Patent number 5,015,331
- Issue date May 14, 1991
- Matrix Integrated Systems
- Gary B. Powell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled chuck for elevated temperature etch processing
- Patent number 4,971,653
- Issue date Nov 20, 1990
- Matrix Integrated Systems
- Gary B. Powell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor apparatus
- Patent number 4,579,618
- Issue date Apr 1, 1986
- Tegal Corporation
- Salvatore A. Celestino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENDPOINT DETECTION METHOD FOR CHAMBER COMPONENT REFURBISHMENT
- Publication number 20230184539
- Publication date Jun 15, 2023
- ASM IP HOLDING B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CHEMICAL MONITORING
- Publication number 20090075403
- Publication date Mar 19, 2009
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Chemical Monitoring
- Publication number 20070064227
- Publication date Mar 22, 2007
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and device utilizing plasma source for real-time gas sampling
- Publication number 20060203239
- Publication date Sep 14, 2006
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for chemical monitoring
- Publication number 20050046825
- Publication date Mar 3, 2005
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and device utilizing plasma source for real-time gas sampling
- Publication number 20050030531
- Publication date Feb 10, 2005
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and device utilizing real-time gas sampling
- Publication number 20030133106
- Publication date Jul 17, 2003
- Lightwind Corporation
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and device utilizing plasma source for real-time gas sampling
- Publication number 20020135761
- Publication date Sep 26, 2002
- Gary Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and device utilizing real-time gas sampling
- Publication number 20020093652
- Publication date Jul 18, 2002
- Gary Powell
- G01 - MEASURING TESTING

Gary B. Powell

Person

Patents Grantslast 30 patents

Method and apparatus for chemical monitoring

Method and apparatus for chemical monitoring

Method and device utilizing plasma source for real-time gas sampling

Method and apparatus for chemical monitoring

Method and device utilizing plasma source for real-time gas sampling

Inductively coupled plasma spectrometer for process diagnostics and...

Method and device utilizing plasma source for real-time gas sampling

Method and device utilizing real-time gas sampling

Method and device utilizing real-time gas sampling

Parallel plate reactor and method of use

Method of plasma etching with parallel plate reactor having a grid

Temperature controlled chuck for elevated temperature etch processing

Plasma reactor apparatus

Patents Applicationslast 30 patents

ENDPOINT DETECTION METHOD FOR CHAMBER COMPONENT REFURBISHMENT

METHOD AND APPARATUS FOR CHEMICAL MONITORING

Method and Apparatus for Chemical Monitoring

Method and device utilizing plasma source for real-time gas sampling

Method and apparatus for chemical monitoring

Method and device utilizing plasma source for real-time gas sampling

Method and device utilizing real-time gas sampling

Method and device utilizing plasma source for real-time gas sampling

Method and device utilizing real-time gas sampling