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Gary C. Hsueh
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Cupertino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus employing integrated metrology for improved di...
Patent number
7,265,382
Issue date
Sep 4, 2007
Applied Materials, Inc.
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching low k dielectrics
Patent number
6,547,977
Issue date
Apr 15, 2003
Applied Materials Inc.
Chun Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Backside gas quick dump apparatus for a semiconductor wafer process...
Patent number
5,856,906
Issue date
Jan 5, 1999
Applied Materials, Inc.
Arnold Kholodenko
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
Method and apparatus employing integrated metrology for improved di...
Publication number
20040092047
Publication date
May 13, 2004
Applied Materials,Inc
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated system for oxide etching and metal liner deposition
Publication number
20030027427
Publication date
Feb 6, 2003
APPLIED MATERIALS, INC.
Diana Xiaobing Ma
H01 - BASIC ELECTRIC ELEMENTS