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Gary Dahrooge
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Germantown, MD, US
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last 30 patents
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Patent Grant
Plasma process for removing polymer and residues from substrates
Patent number
6,834,656
Issue date
Dec 28, 2004
Axcelis Technology, Inc.
Han Qingyuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Plasma process for removing polymer and residues from substrates
Publication number
20020185151
Publication date
Dec 12, 2002
Han Qingyuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...