Gary Lam

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Post-chemical mechanical polishing brush cleaning box
- Patent number 12,023,779
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Gary Ka Ho Lam
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature control of chemical mechanical polishing
- Patent number 9,005,999
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptively tracking spectrum features for endpoint detection
- Patent number 8,930,013
- Issue date Jan 6, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chemical mechanical polishing with high throughput and lo...
- Patent number 7,232,761
- Issue date Jun 19, 2007
- Applied Materials, Inc.
- Shijian Li
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing metal and dielectric substrates
- Patent number 6,960,521
- Issue date Nov 1, 2005
- Applied Materials, Inc.
- Yongsik Moon
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for polishing substrates comprising conductiv...
- Patent number 6,790,768
- Issue date Sep 14, 2004
- Applied Materials Inc.
- Yongsik Moon
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chemical mechanical polishing with high throughput and lo...
- Patent number 6,780,773
- Issue date Aug 24, 2004
- Applied Materials Inc.
- Shijian Li
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POST-CHEMICAL MECHANICAL POLISHING BRUSH CLEANING BOX
- Publication number 20230013401
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Gary Ka Ho LAM
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
- Publication number 20140004626
- Publication date Jan 2, 2014
- Applied Materials, Inc.
- KUN XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spray slurry delivery system for polish performance improvement and...
- Publication number 20060025049
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Lizhong Sun
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing metal and dielectric substrates
- Publication number 20050032381
- Publication date Feb 10, 2005
- Yongsik Moon
- B24 - GRINDING POLISHING
Information Patent Application
Method of chemical mechanical polishing with high throughput and lo...
- Publication number 20050026442
- Publication date Feb 3, 2005
- Shijian Li
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing metal and dielectric substrates
- Publication number 20030029841
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC.
- Yongsik Moon
- B24 - GRINDING POLISHING
Information Patent Application
Method of chemical mechanical polishing with high throughput and lo...
- Publication number 20030022497
- Publication date Jan 30, 2003
- APPLIED MATERIALS, INC.
- Shijian Li
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Post-chemical mechanical polishing brush cleaning box

Temperature control of chemical mechanical polishing

Adaptively tracking spectrum features for endpoint detection

Method of chemical mechanical polishing with high throughput and lo...

Method and apparatus for polishing metal and dielectric substrates

Methods and apparatus for polishing substrates comprising conductiv...

Method of chemical mechanical polishing with high throughput and lo...

Patents Applicationslast 30 patents

POST-CHEMICAL MECHANICAL POLISHING BRUSH CLEANING BOX

TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING

Spray slurry delivery system for polish performance improvement and...

Method and apparatus for polishing metal and dielectric substrates

Method of chemical mechanical polishing with high throughput and lo...

Method and apparatus for polishing metal and dielectric substrates

Method of chemical mechanical polishing with high throughput and lo...