Gary M. Cook

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Newton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Heated electrostatic chuck including mechanical clamp capability at...
- Patent number 8,941,968
- Issue date Jan 27, 2015
- Axcelis Technologies, Inc.
- Perry J. I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated annulus chuck
- Patent number 8,797,706
- Issue date Aug 5, 2014
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATED ANNULUS CHUCK
- Publication number 20110299218
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...
- Publication number 20110299217
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- Perry J.I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS