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Gary W. Groshong
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Brentwood, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Shield assembly for substrate processing chamber
Patent number
6,780,294
Issue date
Aug 24, 2004
Set, Tosoh
Robert B. Hixson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition apparatus with modified shutter disk and...
Patent number
6,736,946
Issue date
May 18, 2004
Integrated Device Technology, Inc.
Robert B. Hixson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Physical vapor deposition apparatus with modified shutter disk and...
Patent number
6,440,879
Issue date
Aug 27, 2002
Integrated Device Technology, Inc.
Robert B. Hixson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Shield Components With Enhanced Thermal and Mechanical Stability
Publication number
20080268281
Publication date
Oct 30, 2008
Quan Bai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Physical vapor deposition apparatus with modified shutter disk and...
Publication number
20020166762
Publication date
Nov 14, 2002
Robert B. Hixson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS WITH MODIFIED SHUTTER DISK AND...
Publication number
20020088771
Publication date
Jul 11, 2002
Robert B. Hixson
H01 - BASIC ELECTRIC ELEMENTS