Ge Xu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming silicon oxide film and forming apparatus thereof
- Patent number 7,067,436
- Issue date Jun 27, 2006
- NEC Corp.
- Katsuhisa Yuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 6,892,669
- Issue date May 17, 2005
- Anelva Corporation
- Ge Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of forming silicon oxide film and forming apparatus thereof
- Publication number 20040198071
- Publication date Oct 7, 2004
- Katsuhisa Yuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming silicon oxide film and forming apparatus thereof
- Publication number 20020006478
- Publication date Jan 17, 2002
- Katsuhisa Yuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD apparatus
- Publication number 20010042512
- Publication date Nov 22, 2001
- Ge Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...