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Geert Vandenberghe
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Wijgmaal, BE
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Patents Grants
last 30 patents
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Patent Grant
Marker structure, mask pattern, alignment method and lithographic m...
Patent number
7,466,413
Issue date
Dec 16, 2008
ASML Netherlands B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
MARKER STRUCTURE, MASK PATTERN, ALIGNMENT METHOD, AND LITHOGRAPHIC...
Publication number
20090073406
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Marker structure, mask pattern, alignment method and lithographic m...
Publication number
20050031969
Publication date
Feb 10, 2005
ASML NETHERLANDS B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY