Gen Nakamura

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam exposure apparatus and electron beam measurement module
- Patent number 7,034,321
- Issue date Apr 25, 2006
- Advantest Corporation
- Masaki Takakuwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 6,810,299
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Gen Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing apparatus and device manufacturing method
- Patent number 6,566,770
- Issue date May 20, 2003
- Canon Kabushiki Kaisha
- Gen Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and device manufacturing method using the same i...
- Patent number 6,337,732
- Issue date Jan 8, 2002
- Canon Kabushiki Kaisha
- Gen Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,295,121
- Issue date Sep 25, 2001
- Canon Kabushiki Kaisha
- Gen Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying system
- Patent number 6,236,904
- Issue date May 22, 2001
- Canon Kabushiki Kaisha
- Gen Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacture of semiconductor devices
- Patent number 5,740,052
- Issue date Apr 14, 1998
- Canon Kabushiki Kaisha
- Gen Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Container for a plate-like article
- Patent number 5,314,068
- Issue date May 24, 1994
- Canon Kabushiki Kaisha
- Hiroshi Nakazato
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
System for photoelectric detection
- Patent number 4,694,186
- Issue date Sep 15, 1987
- Canon Kabushiki Kaisha
- Ruri Onoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Electron beam exposure apparatus and electron beam measurement module
- Publication number 20050023486
- Publication date Feb 3, 2005
- Advantest Corporation
- Masaki Takakuwa
- B82 - NANO-TECHNOLOGY
Information Patent Application
Semiconductor manufacturing apparatus
- Publication number 20020097205
- Publication date Jul 25, 2002
- Canon Kabushiki Kaisha
- Gen Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Gen Nakamura

Person

Patents Grantslast 30 patents

Electron beam exposure apparatus and electron beam measurement module

Semiconductor manufacturing apparatus

Semiconductor manufacturing apparatus and device manufacturing method

Exposure apparatus and device manufacturing method using the same i...

Exposure apparatus

Substrate conveying system

Method and apparatus for manufacture of semiconductor devices

Container for a plate-like article

System for photoelectric detection

Patents Applicationslast 30 patents

Electron beam exposure apparatus and electron beam measurement module

Semiconductor manufacturing apparatus