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Oita Oita, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor device
Patent number
11,830,847
Issue date
Nov 28, 2023
Kioxia Corporation
Gen Toyota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
10,818,501
Issue date
Oct 27, 2020
TOSHIBA MEMORY CORPORATION
Takashi Shirono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
9,935,232
Issue date
Apr 3, 2018
TOSHIBA MEMORY CORPORATION
Gen Toyota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
8,292,694
Issue date
Oct 23, 2012
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
7,883,394
Issue date
Feb 8, 2011
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
7,767,472
Issue date
Aug 3, 2010
Ebara Corporation
Atsushi Shigeta
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
7,744,445
Issue date
Jun 29, 2010
Kabushiki Kaisha Toshiba
Takeo Kubota
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
7,419,420
Issue date
Sep 2, 2008
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method of processing a substrate
Patent number
7,241,205
Issue date
Jul 10, 2007
Kabushiki Kaisha Toshiba
Gen Toyota
B24 - GRINDING POLISHING
Information
Patent Grant
Method of processing a substrate
Patent number
7,217,662
Issue date
May 15, 2007
Kabushiki Kaisha Toshiba
Gen Toyota
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
7,014,529
Issue date
Mar 21, 2006
Kabushiki Kaisha Toshiba
Takeo Kubota
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,...
Publication number
20240055363
Publication date
Feb 15, 2024
Kioxia Corporation
Susumu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230411287
Publication date
Dec 21, 2023
KIOXIA Corporation
Eiichi SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20230307415
Publication date
Sep 28, 2023
KIOXIA Corporation
Satoshi HONGO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SAME
Publication number
20230101002
Publication date
Mar 30, 2023
KIOXIA Corporation
Gen TOYOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DE...
Publication number
20220375901
Publication date
Nov 24, 2022
KIOXIA Corporation
Susumu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Publication number
20220077106
Publication date
Mar 10, 2022
KIOXIA Corporation
Gen TOYOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20190362980
Publication date
Nov 28, 2019
Toshiba Memory Corporation
Takashi SHIRONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20160268469
Publication date
Sep 15, 2016
Kabushiki Kaisha Toshiba
Gen Toyota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100255757
Publication date
Oct 7, 2010
Atsushi Shigeta
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBS...
Publication number
20100062691
Publication date
Mar 11, 2010
Tetsuji TOGAWA
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and polishing method
Publication number
20090017730
Publication date
Jan 15, 2009
Takeo Kubota
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBS...
Publication number
20080318503
Publication date
Dec 25, 2008
Tetsuji TOGAWA
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20070287364
Publication date
Dec 13, 2007
Atsushi Shigeta
B24 - GRINDING POLISHING
Information
Patent Application
Method of processing a substrate
Publication number
20070178701
Publication date
Aug 2, 2007
Kabushiki Kaisha Toshiba
Gen Toyota
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing method and semiconductor device manufacturing...
Publication number
20070000873
Publication date
Jan 4, 2007
Takeo Kubota
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding mechanism, substrate polishing apparatus and subs...
Publication number
20060205323
Publication date
Sep 14, 2006
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20060019417
Publication date
Jan 26, 2006
Atsushi Shigeta
B24 - GRINDING POLISHING
Information
Patent Application
Method of processing a substrate
Publication number
20050245174
Publication date
Nov 3, 2005
Gen Toyota
B24 - GRINDING POLISHING
Information
Patent Application
Method of processing a substrate
Publication number
20050221615
Publication date
Oct 6, 2005
Gen Toyota
B24 - GRINDING POLISHING