Genichi Katagiri

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma deposition method and an apparatus therefor
- Patent number 5,948,485
- Issue date Sep 7, 1999
- Tokyo Electron Limited
- Hideaki Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 5,160,152
- Issue date Nov 3, 1992
- Fuji Electric Co., Ltd.
- Makoto Toraguchi
- H01 - BASIC ELECTRIC ELEMENTS