Genji Sakata

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck, vacuum processing apparatus, and substrate pro...
- Patent number 12,014,946
- Issue date Jun 18, 2024
- Ulvac, Inc.
- Genji Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solar cell manufacturing apparatus and solar cell manufacturing method
- Patent number 8,932,896
- Issue date Jan 13, 2015
- ULVAC, Inc.
- Genji Sakata
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK, VACUUM PROCESSING APPARATUS, AND SUBSTRATE PRO...
- Publication number 20210296154
- Publication date Sep 23, 2021
- Genji SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL MANUFACTURING METHOD AND SOLAR CELL
- Publication number 20140318608
- Publication date Oct 30, 2014
- Genji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solar Cell Manufacturing Apparatus and Solar Cell Manufacturing Method
- Publication number 20130052771
- Publication date Feb 28, 2013
- Ulvac, Inc.
- Genji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...
- Publication number 20100151150
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS