Genki Murayama

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Alignment apparatus, alignment method, lithography apparatus, and m...
- Patent number 11,360,401
- Issue date Jun 14, 2022
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, position detection method, lithograph...
- Patent number 11,249,401
- Issue date Feb 15, 2022
- Canon Kabushiki Kaisha
- Genki Murayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation method, determination method, lithography apparatus, and...
- Patent number 10,943,343
- Issue date Mar 9, 2021
- Canon Kabushiki Kaisha
- Genki Murayama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imprint apparatus, and method of manufacturing article
- Patent number 10,611,063
- Issue date Apr 7, 2020
- Canon Kabushiki Kaisha
- Genki Murayama
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, LITHOGRAPH...
- Publication number 20210103226
- Publication date Apr 8, 2021
- Canon Kabushiki Kaisha
- Genki Murayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT APPARATUS, ALIGNMENT METHOD, LITHOGRAPHY APPARATUS, AND M...
- Publication number 20200387075
- Publication date Dec 10, 2020
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION METHOD, DETERMINATION METHOD, LITHOGRAPHY APPARATUS, AND...
- Publication number 20190122358
- Publication date Apr 25, 2019
- Canon Kabushiki Kaisha
- Genki Murayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160052179
- Publication date Feb 25, 2016
- Canon Kabushiki Kaisha
- Genki Murayama
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL