Gennady V. Belokopytov

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Moscow, RU

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Patents Grantslast 30 patents

Information Patent Grant
Mask correction for photolithographic processes
- Patent number 6,934,410
- Issue date Aug 23, 2005
- LSI Logic Corporation
- Stanislav V. Aleshin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY