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Gentaro Goshi
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Phoenix, AZ, US
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last 30 patents
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Patent Application
METHOD FOR TREATING A SUBSTRATE WITH A HIGH PRESSURE FLUID USING A...
Publication number
20060102590
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Robert Kevwitch
B08 - CLEANING
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Patent Application
Method and system for homogenization of supercritical fluid in a hi...
Publication number
20060065189
Publication date
Mar 30, 2006
Darko Babic
B08 - CLEANING