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Gentaro Hida
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Joetsu-shi, JP
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last 30 patents
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Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND PATTERNING PRO...
Publication number
20240377737
Publication date
Nov 14, 2024
Shin-Etsu Chemical Co., Ltd.
Gentaro Hida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RESIST MATERIAL AND PATTERN FORMING METHOD
Publication number
20230296980
Publication date
Sep 21, 2023
Shin-Etsu Chemical Co., Ltd.
Yutaro OTOMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST MATERIAL AND PATTERNING PROCESS
Publication number
20230296981
Publication date
Sep 21, 2023
Shin-Etsu Chemical Co., Ltd.
Gentaro HIDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY