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Geoffrey B. Wardman
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Milford, CT, US
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last 30 patents
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Patent Grant
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator
Patent number
7,290,931
Issue date
Nov 6, 2007
ASML Holding N.V.
Geoffrey B. Wardman
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator
Publication number
20070014494
Publication date
Jan 18, 2007
ASML Holding N.V.
Geoffrey B. Wardman
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...