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Geoffrey Hayward
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Frimley, GB
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last 30 patents
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Patent Grant
Oven for the heat treatment of semiconductor substrates
Patent number
4,775,317
Issue date
Oct 4, 1988
Heraeus Quarzschmelze GmbH
Karl A. Schulke
C30 - CRYSTAL GROWTH
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Patent Grant
Apparatus for automatically loading a furnace with semiconductor wa...
Patent number
4,669,938
Issue date
Jun 2, 1987
Heraeus Quarzschmelze GmbH
Geoffrey Hayward
C30 - CRYSTAL GROWTH