Membership
Tour
Register
Log in
Georg Aigeldinger
Follow
Person
Livermore, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Vitreous carbon mask substrate for X-ray lithography
Patent number
7,608,367
Issue date
Oct 27, 2009
Sandia Corporation
Georg Aigeldinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY