Georg Roters

Person

Strasse, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
- Patent number 8,236,706
- Issue date Aug 7, 2012
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for thermally treating semiconductor wafers
- Patent number 7,151,060
- Issue date Dec 19, 2006
- Mattson Thermal Products GmbH
- Georg Roters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for thermally treating a substrate that comprises several la...
- Patent number 7,144,747
- Issue date Dec 5, 2006
- Mattson Thermal Products GmbH
- Hin Yiu Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the production of process gas that include...
- Patent number 7,144,826
- Issue date Dec 5, 2006
- Mattson Thermal Products
- Georg Roters
- F22 - STEAM GENERATION
Information Patent Grant
Method of forming and/or modifying a dielectric film on a semicondu...
- Patent number 7,101,812
- Issue date Sep 5, 2006
- Mattson Technology, Inc.
- Ignaz Eisele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for minimizing the vapor deposition of tungsten oxide during...
- Patent number 7,094,637
- Issue date Aug 22, 2006
- Infineon Technologies AG
- Olaf Storbeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of oxidation of semiconductor wafers in a rapid thermal proc...
- Patent number 5,935,650
- Issue date Aug 10, 1999
- Wilfried Lerch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
- Publication number 20120298039
- Publication date Nov 29, 2012
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
- Publication number 20100151694
- Publication date Jun 17, 2010
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for thermally treating semiconductor wafers
- Publication number 20060105584
- Publication date May 18, 2006
- Georg Roters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for thermally treating a substrate that comprises several la...
- Publication number 20040209483
- Publication date Oct 21, 2004
- Hin Yiu Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the production of process gases
- Publication number 20040137754
- Publication date Jul 15, 2004
- Georg Roters
- F22 - STEAM GENERATION
Information Patent Application
Method for minimizing the vapor deposition of tungsten oxide during...
- Publication number 20040121569
- Publication date Jun 24, 2004
- Olaf Storbeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming and/or modifying a dielectric film on a semicondu...
- Publication number 20040058557
- Publication date Mar 25, 2004
- Mattson Technology, Inc.
- Ignaz Eisele
- H01 - BASIC ELECTRIC ELEMENTS

Georg Roters

Person

Patents Grantslast 30 patents

Method and apparatus for growing thin oxide films on silicon while...

Device and method for thermally treating semiconductor wafers

Method for thermally treating a substrate that comprises several la...

Method and apparatus for the production of process gas that include...

Method of forming and/or modifying a dielectric film on a semicondu...

Method for minimizing the vapor deposition of tungsten oxide during...

Method of oxidation of semiconductor wafers in a rapid thermal proc...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...

METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...

Device and method for thermally treating semiconductor wafers

Method for thermally treating a substrate that comprises several la...

Method and apparatus for the production of process gases

Method for minimizing the vapor deposition of tungsten oxide during...

Method of forming and/or modifying a dielectric film on a semicondu...