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George A. Burt Jr.
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Fremont, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for detecting defects on a disk using interfer...
Patent number
5,883,714
Issue date
Mar 16, 1999
Phase Metrics
Peter C. Jann
G01 - MEASURING TESTING
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Patent Grant
Apparatus and method for surface inspection by specular interferome...
Patent number
5,875,029
Issue date
Feb 23, 1999
Phase Metrics, Inc.
Peter C. Jann
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for combined glide and defect analysis
Patent number
5,792,947
Issue date
Aug 11, 1998
Phase Metrics
Vladimir Pogrebinsky
G01 - MEASURING TESTING