George D. Papasouliotis

Person

Fishkill, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Techniques for forming 3D structures
- Patent number 9,240,350
- Issue date Jan 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for plasma processing a substrate
- Patent number 9,123,509
- Issue date Sep 1, 2015
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced etch and deposition profile control using plasma sheath en...
- Patent number 8,858,816
- Issue date Oct 14, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Grant
Closed loop process control of plasma processed materials
- Patent number 8,728,587
- Issue date May 20, 2014
- Varian Semiconductor Equipment Associates, Inc.
- George Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting film delamination and a method thereof
- Patent number 8,698,106
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Helen Maynard
- G01 - MEASURING TESTING
Information Patent Grant
Technique for processing a substrate having a non-planar surface
- Patent number 8,679,960
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for selectively controlling ion composition of io...
- Patent number 8,664,561
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced etch and deposition profile control using plasma sheath en...
- Patent number 8,603,591
- Issue date Dec 10, 2013
- Varian Semiconductor Ewuipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Grant
Titanium diboride coating for plasma processing apparatus
- Patent number 8,592,783
- Issue date Nov 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate having a non-planar substrate sur...
- Patent number 8,507,372
- Issue date Aug 13, 2013
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stencil mask profile
- Patent number 8,431,495
- Issue date Apr 30, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Helen Maynard
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of processing a substrate having a non-planar surface
- Patent number 8,202,792
- Issue date Jun 19, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with heavy halogenide compounds
- Patent number 7,927,986
- Issue date Apr 19, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for porogen removal and mechanical strength enhancement of l...
- Patent number 7,892,985
- Issue date Feb 22, 2011
- Novellus Systems, Inc.
- Seon-Mee Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective coverage of high aspect ratio structures with a...
- Patent number 7,863,190
- Issue date Jan 4, 2011
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Implantation of multiple species to address copper reliability
- Patent number 7,863,194
- Issue date Jan 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Heyun Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential deposition/anneal film densification method
- Patent number 7,790,633
- Issue date Sep 7, 2010
- Novellus Systems, Inc.
- Raihan M. Tarafdar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation of multiple species to address copper reliability
- Patent number 7,737,013
- Issue date Jun 15, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Heyun Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Profile adjustment in plasma ion implanter
- Patent number 7,687,787
- Issue date Mar 30, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective coverage of high aspect ratio structures with a...
- Patent number 7,625,820
- Issue date Dec 1, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydroxyl bond removal and film densification method for oxide films...
- Patent number 7,589,028
- Issue date Sep 15, 2009
- Novellus Systems, Inc.
- Seon-Mee Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed loop control and process optimization in plasma doping proce...
- Patent number 7,586,100
- Issue date Sep 8, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Deven M. Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-free catalysts for pulsed deposition layer process for confor...
- Patent number 7,491,653
- Issue date Feb 17, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal nanolaminate dielectric deposition and etch bag gap fill...
- Patent number 7,482,247
- Issue date Jan 27, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling properties of conformal silica nanolaminates...
- Patent number 7,297,608
- Issue date Nov 20, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the use of alkoxysilanol precursors for vapor depositio...
- Patent number 7,294,583
- Issue date Nov 13, 2007
- Novellus Systems, Inc.
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed deposition layer gap fill with expansion material
- Patent number 7,288,463
- Issue date Oct 30, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming high density, conformal, silica nanolaminate fi...
- Patent number 7,271,112
- Issue date Sep 18, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic rapid vapor deposition process for conformal silica laminates
- Patent number 7,223,707
- Issue date May 29, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process modulation to prevent structure erosion during gap fill
- Patent number 7,217,658
- Issue date May 15, 2007
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED ETCH AND DEPOSITION PROFILE CONTROL USING PLASMA SHEATH EN...
- Publication number 20140034611
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Application
TITANIUM DIBORIDE COATING FOR PLASMA PROCESSING APPARATUS
- Publication number 20130075253
- Publication date Mar 28, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLOSED LOOP PROCESS CONTROL OF PLASMA PROCESSED MATERIALS
- Publication number 20120328771
- Publication date Dec 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A RETROGRADE MATERIAL PROFILE USING ION IMPLANTATION
- Publication number 20120309180
- Publication date Dec 6, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE HAVING A NON-PLANAR SUBSTRATE SUR...
- Publication number 20120295430
- Publication date Nov 22, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR FORMING 3D STRUCTURES
- Publication number 20120295444
- Publication date Nov 22, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE AND APPARATUS FOR ION-ASSISTED ATOMIC LAYER DEPOSITION
- Publication number 20120263887
- Publication date Oct 18, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STENCIL MASK PROFILE
- Publication number 20120009798
- Publication date Jan 12, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Helen Maynard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PLASMA PROCESSING A SUBSTRATE
- Publication number 20110309049
- Publication date Dec 22, 2011
- Varian Semiconductor Equipment Associates, Inc.
- George D. PAPASOULIOTIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for Processing a Substrate Having a Non-Planar Surface
- Publication number 20110086501
- Publication date Apr 14, 2011
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED DEPOSITION AND RECRYSTALLIZATION AND TANDEM SOLAR CELL DESIG...
- Publication number 20110039034
- Publication date Feb 17, 2011
- Helen Maynard
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF IO...
- Publication number 20110000896
- Publication date Jan 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE HAVING A NON-PLANAR SURFACE
- Publication number 20100273322
- Publication date Oct 28, 2010
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Etch and Deposition Profile Control Using Plasma Sheath En...
- Publication number 20100252531
- Publication date Oct 7, 2010
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Application
IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY
- Publication number 20100240201
- Publication date Sep 23, 2010
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE,INC.
- Heyun YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR ATOMIC LAYER DEPOSITION
- Publication number 20100098851
- Publication date Apr 22, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Shigemi MURAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Implantation with Heavy Halogenide Compounds
- Publication number 20100022076
- Publication date Jan 28, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SEALING PORES IN A POROUS SUBSTRATE
- Publication number 20090324849
- Publication date Dec 31, 2009
- VARIAN SEMICONDUCTOR EQUIPEMENT ASSOCIATES, INC.
- George D. PAPASOULIOTIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DETECTING FILM DELAMINATION AND A METHOD THEREOF
- Publication number 20090278059
- Publication date Nov 12, 2009
- Helen Maynard
- G01 - MEASURING TESTING
Information Patent Application
Method Of Forming A Retrograde Material Profile Using Ion Implantation
- Publication number 20090227096
- Publication date Sep 10, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESTABLISHING A HIGH PHOSPHORUS CONCENTRATION IN SOLAR CELLS
- Publication number 20090227061
- Publication date Sep 10, 2009
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Closed Loop Control And Process Optimization In Plasma Doping Proce...
- Publication number 20090200461
- Publication date Aug 13, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Deven M. Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY
- Publication number 20090117735
- Publication date May 7, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Heyun YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE NEUTRALIZATION IN A PLASMA PROCESSING APPARATUS
- Publication number 20090084987
- Publication date Apr 2, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE ADJUSTMENT IN PLASMA ION IMPLANTER
- Publication number 20090061605
- Publication date Mar 5, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Plasma Processing with In-Situ Monitoring and Process Par...
- Publication number 20070224840
- Publication date Sep 27, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE FOR ATOMIC LAYER DEPOSITION
- Publication number 20070087581
- Publication date Apr 19, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Vikram SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

George D. Papasouliotis

Person

Patents Grantslast 30 patents

Techniques for forming 3D structures

Techniques for plasma processing a substrate

Enhanced etch and deposition profile control using plasma sheath en...

Closed loop process control of plasma processed materials

Apparatus for detecting film delamination and a method thereof

Technique for processing a substrate having a non-planar surface

System and method for selectively controlling ion composition of io...

Enhanced etch and deposition profile control using plasma sheath en...

Titanium diboride coating for plasma processing apparatus

Method for processing a substrate having a non-planar substrate sur...

Stencil mask profile

Method of processing a substrate having a non-planar surface

Ion implantation with heavy halogenide compounds

Method for porogen removal and mechanical strength enhancement of l...

Method of selective coverage of high aspect ratio structures with a...

Implantation of multiple species to address copper reliability

Sequential deposition/anneal film densification method

Implantation of multiple species to address copper reliability

Profile adjustment in plasma ion implanter

Method of selective coverage of high aspect ratio structures with a...

Hydroxyl bond removal and film densification method for oxide films...

Closed loop control and process optimization in plasma doping proce...

Metal-free catalysts for pulsed deposition layer process for confor...

Conformal nanolaminate dielectric deposition and etch bag gap fill...

Method for controlling properties of conformal silica nanolaminates...

Methods for the use of alkoxysilanol precursors for vapor depositio...

Pulsed deposition layer gap fill with expansion material

Methods for forming high density, conformal, silica nanolaminate fi...

Dynamic rapid vapor deposition process for conformal silica laminates

Process modulation to prevent structure erosion during gap fill

Patents Applicationslast 30 patents

ENHANCED ETCH AND DEPOSITION PROFILE CONTROL USING PLASMA SHEATH EN...

TITANIUM DIBORIDE COATING FOR PLASMA PROCESSING APPARATUS

CLOSED LOOP PROCESS CONTROL OF PLASMA PROCESSED MATERIALS

METHOD OF FORMING A RETROGRADE MATERIAL PROFILE USING ION IMPLANTATION

METHOD FOR PROCESSING A SUBSTRATE HAVING A NON-PLANAR SUBSTRATE SUR...

TECHNIQUES FOR FORMING 3D STRUCTURES

TECHNIQUE AND APPARATUS FOR ION-ASSISTED ATOMIC LAYER DEPOSITION

STENCIL MASK PROFILE

TECHNIQUES FOR PLASMA PROCESSING A SUBSTRATE

Technique for Processing a Substrate Having a Non-Planar Surface

PULSED DEPOSITION AND RECRYSTALLIZATION AND TANDEM SOLAR CELL DESIG...

SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF IO...

METHOD OF PROCESSING A SUBSTRATE HAVING A NON-PLANAR SURFACE

Enhanced Etch and Deposition Profile Control Using Plasma Sheath En...

IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY

TECHNIQUES FOR ATOMIC LAYER DEPOSITION

Ion Implantation with Heavy Halogenide Compounds

METHOD FOR SEALING PORES IN A POROUS SUBSTRATE

APPARATUS FOR DETECTING FILM DELAMINATION AND A METHOD THEREOF

Method Of Forming A Retrograde Material Profile Using Ion Implantation

ESTABLISHING A HIGH PHOSPHORUS CONCENTRATION IN SOLAR CELLS

Closed Loop Control And Process Optimization In Plasma Doping Proce...

IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY

CHARGE NEUTRALIZATION IN A PLASMA PROCESSING APPARATUS

PROFILE ADJUSTMENT IN PLASMA ION IMPLANTER

Method of Plasma Processing with In-Situ Monitoring and Process Par...

TECHNIQUE FOR ATOMIC LAYER DEPOSITION