TREA

George Diercks

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  • Washington Township, OH, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Showerhead electrodes
    • Patent number 8,268,117
    • Issue date Sep 18, 2012
    • Lam Research Corporation
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead electrode assemblies and plasma processing chambers inco...
    • Patent number 8,152,954
    • Issue date Apr 10, 2012
    • Lam Research Corporation
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SHOWERHEAD ELECTRODES
    • Publication number 20120160941
    • Publication date Jun 28, 2012
    • LAM RESEARCH CORPORATION
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
    • Publication number 20090095424
    • Publication date Apr 16, 2009
    • LAM RESEARCH CORPORATION
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma etching chamber parts made with EDM
    • Publication number 20070284339
    • Publication date Dec 13, 2007
    • David O. Moore
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR