Georgiy O. Vaschenko

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Target delivery system
- Patent number 11,856,681
- Issue date Dec 26, 2023
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for extending target material delivery system...
- Patent number 11,690,159
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Bob Rollinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target formation apparatus
- Patent number 11,448,967
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of purifying target material for an EUV light source
- Patent number 11,317,501
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Supply system for an extreme ultraviolet light source
- Patent number 10,904,994
- Issue date Jan 26, 2021
- ASML Netherlands B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System method and apparatus for high pressure liquid jet cleaning o...
- Patent number 10,632,505
- Issue date Apr 28, 2020
- ASML Netherlands B.V.
- Armin Bernhard Ridinger
- B08 - CLEANING
Information Patent Grant
Supply system for an extreme ultraviolet light source
- Patent number 10,499,485
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Droplet generator for lithographic apparatus, EUV source and lithog...
- Patent number 10,481,498
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for purifying target material for EUV light so...
- Patent number 10,455,680
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method of and apparatus for supply and recovery of target material
- Patent number 9,699,876
- Issue date Jul 4, 2017
- ASML Netherlands, B.V.
- Georgiy Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,632,418
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,392,678
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter for material supply apparatus of an extreme ultraviolet ligh...
- Patent number 9,029,813
- Issue date May 12, 2015
- ASML Netherlands B.V.
- Igor V. Fomenkov
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,969,839
- Issue date Mar 3, 2015
- ASML Netherlands, B.V.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,969,840
- Issue date Mar 3, 2015
- ASML Netherlands B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for protecting an EUV light source chamber from...
- Patent number 8,969,838
- Issue date Mar 3, 2015
- ASML Netherlands B.V.
- Georgiy O. Vaschenko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,829,477
- Issue date Sep 9, 2014
- ASML Netherlands B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,748,854
- Issue date Jun 10, 2014
- ASML Netherlands B.V.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,530,871
- Issue date Sep 10, 2013
- Cymer, LLC
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,513,629
- Issue date Aug 20, 2013
- Cymer, LLC
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma EUV light source having a droplet stream prod...
- Patent number 8,319,201
- Issue date Nov 27, 2012
- Cymer, Inc.
- Georgiy O. Vaschenko
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,158,960
- Issue date Apr 17, 2012
- Cymer, Inc.
- Georgiy O. Vaschenko
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System, method and apparatus for droplet catcher for prevention of...
- Patent number 8,138,487
- Issue date Mar 20, 2012
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Nanometer-scale ablation using focused, coherent extreme ultraviole...
- Patent number 7,931,850
- Issue date Apr 26, 2011
- Colorado State University Research Foundation
- Carmen S. Menoni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma EUV light source having a droplet stream prod...
- Patent number 7,897,947
- Issue date Mar 1, 2011
- Cymer, Inc.
- Georgiy Vaschenko
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods for target material delivery in a laser produce...
- Patent number 7,872,245
- Issue date Jan 18, 2011
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET DELIVERY SYSTEM
- Publication number 20240090109
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENE...
- Publication number 20230164900
- Publication date May 25, 2023
- ASML NETHERLANDS B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NOZZLE APPARATUS
- Publication number 20220295625
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET DELIVERY SYSTEM
- Publication number 20220061144
- Publication date Feb 24, 2022
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM...
- Publication number 20210392733
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Bob Rollinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET FORMATION APPARATUS
- Publication number 20210311398
- Publication date Oct 7, 2021
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20200128657
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
- Publication number 20200015343
- Publication date Jan 9, 2020
- ASML NETHERLANDS B.V.
- Georgiy VASCHENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20180368242
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...
- Publication number 20180364580
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System Method and Apparatus for High Pressure Liquid Jet Cleaning o...
- Publication number 20170291196
- Publication date Oct 12, 2017
- ASML NETHERLANDS B.V.
- Armin Bernhard Ridinger
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
- Publication number 20170247778
- Publication date Aug 31, 2017
- ASML NETHERLANDS B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20160274466
- Publication date Sep 22, 2016
- ASML NETHERLANDS B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20140346373
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER PRODUCED PLASMA EUV LIGHT SOURCE
- Publication number 20140264093
- Publication date Sep 18, 2014
- ASML NETHERLANDS B.V.
- Georgiy O. Vaschenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
- Publication number 20140261761
- Publication date Sep 18, 2014
- Georgiy VASCHENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20140102875
- Publication date Apr 17, 2014
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER PRODUCED PLASMA EUV LIGHT SOURCE
- Publication number 20140042343
- Publication date Feb 13, 2014
- CYMER, LLC
- Georgiy O. Vaschenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20130234051
- Publication date Sep 12, 2013
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Filter for Material Supply Apparatus
- Publication number 20120292527
- Publication date Nov 22, 2012
- Cymer, Inc.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20120286176
- Publication date Nov 15, 2012
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER PRODUCED PLASMA EUV LIGHT SOURCE
- Publication number 20120228526
- Publication date Sep 13, 2012
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser produced plasma EUV light source having a droplet stream prod...
- Publication number 20110233429
- Publication date Sep 29, 2011
- Cymer, Inc.
- Georgiy Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NANOMETER-SCALE ABLATION USING FOCUSED, COHERENT EXTREME ULTRAVIOLE...
- Publication number 20110042353
- Publication date Feb 24, 2011
- Colorado State University Research Foundation
- Carmen S. Menoni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Produced Plasma EUV Light Source
- Publication number 20100294953
- Publication date Nov 25, 2010
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for protecting an EUV light source chamber from...
- Publication number 20100258747
- Publication date Oct 14, 2010
- Cymer, Inc.
- Georgiy O. Vaschenko
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF...
- Publication number 20100258748
- Publication date Oct 14, 2010
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for target material delivery in a laser produce...
- Publication number 20090230326
- Publication date Sep 17, 2009
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser produced plasma EUV light source having a droplet stream prod...
- Publication number 20090014668
- Publication date Jan 15, 2009
- Cymer, Inc.
- Georgiy Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NANOMETER-SCALE ABLATION USING FOCUSED, COHERENT EXTREME ULTRAVIOLE...
- Publication number 20080093775
- Publication date Apr 24, 2008
- Colorado State University Research Foundation
- Carmen S. Menoni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Georgiy O. Vaschenko

Person

Patents Grantslast 30 patents

Target delivery system

Apparatus and method for extending target material delivery system...

Target formation apparatus

Method of purifying target material for an EUV light source

Supply system for an extreme ultraviolet light source

System method and apparatus for high pressure liquid jet cleaning o...

Supply system for an extreme ultraviolet light source

Droplet generator for lithographic apparatus, EUV source and lithog...

Method and apparatus for purifying target material for EUV light so...

Method of and apparatus for supply and recovery of target material

Target material supply apparatus for an extreme ultraviolet light s...

Target material supply apparatus for an extreme ultraviolet light s...

Filter for material supply apparatus of an extreme ultraviolet ligh...

Laser produced plasma EUV light source

Droplet generator with actuator induced nozzle cleaning

Systems and methods for protecting an EUV light source chamber from...

Droplet generator with actuator induced nozzle cleaning

Laser produced plasma EUV light source

Laser produced plasma EUV light source

Droplet generator with actuator induced nozzle cleaning

Laser produced plasma EUV light source having a droplet stream prod...

Laser produced plasma EUV light source

System, method and apparatus for droplet catcher for prevention of...

Nanometer-scale ablation using focused, coherent extreme ultraviole...

Laser produced plasma EUV light source having a droplet stream prod...

Systems and methods for target material delivery in a laser produce...

Patents Applicationslast 30 patents

TARGET DELIVERY SYSTEM

APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENE...

NOZZLE APPARATUS

TARGET DELIVERY SYSTEM

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM...

TARGET FORMATION APPARATUS

SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...

SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...

System Method and Apparatus for High Pressure Liquid Jet Cleaning o...

METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING

LASER PRODUCED PLASMA EUV LIGHT SOURCE

METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

LASER PRODUCED PLASMA EUV LIGHT SOURCE

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING

Filter for Material Supply Apparatus

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING

LASER PRODUCED PLASMA EUV LIGHT SOURCE

Laser produced plasma EUV light source having a droplet stream prod...

NANOMETER-SCALE ABLATION USING FOCUSED, COHERENT EXTREME ULTRAVIOLE...

Laser Produced Plasma EUV Light Source

Systems and methods for protecting an EUV light source chamber from...

SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF...

Systems and methods for target material delivery in a laser produce...

Laser produced plasma EUV light source having a droplet stream prod...

NANOMETER-SCALE ABLATION USING FOCUSED, COHERENT EXTREME ULTRAVIOLE...