Gerald M. Cox

Person

Richmond, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for increased workpiece throughput
- Patent number 6,736,927
- Issue date May 18, 2004
- Matrix Integrated Systems, Inc.
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching sidewall polymer and other residues from the sur...
- Patent number 6,667,244
- Issue date Dec 23, 2003
- Gerald M. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for increased workpiece throughput
- Patent number 6,605,226
- Issue date Aug 12, 2003
- Matrix Integrated Systems, Inc.
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma generator with sliding short tuner
- Patent number 6,439,155
- Issue date Aug 27, 2002
- Matrix Integratea Systems Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Downstream sapphire elbow joint for remote plasma generator
- Patent number 6,412,438
- Issue date Jul 2, 2002
- Matrix Integrated Systems, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for increased workpiece throughput
- Patent number 6,409,932
- Issue date Jun 25, 2002
- Matrix Integrated Systems, Inc.
- Albert Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Remote plasma mixer
- Patent number 6,352,050
- Issue date Mar 5, 2002
- Matrix Integrated Systems, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synchronous multiplexed near zero overhead architecture for vacuum...
- Patent number 6,273,956
- Issue date Aug 14, 2001
- Matrix Intergrated Systems, Inc.
- Gerald M. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave choke for remote plasma generator
- Patent number 6,263,830
- Issue date Jul 24, 2001
- Matrix Integrated Systems, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synchronous multiplexed near zero overhead architecture for vacuum...
- Patent number 6,228,773
- Issue date May 8, 2001
- Matrix Integrated Systems, Inc.
- Gerald M. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma discharge device
- Patent number 5,961,851
- Issue date Oct 5, 1999
- Fusion Systems Corporation
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for increased workpiece throughput
- Publication number 20020153099
- Publication date Oct 24, 2002
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for increased workpiece throughput
- Publication number 20020151184
- Publication date Oct 17, 2002
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER
- Publication number 20020112819
- Publication date Aug 22, 2002
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote plasma mixer
- Publication number 20020011214
- Publication date Jan 31, 2002
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Downstream sapphire elbow joint for remote plasma generator
- Publication number 20020011310
- Publication date Jan 31, 2002
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coolant for plasma generator
- Publication number 20020007912
- Publication date Jan 24, 2002
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing photoresist and residues from semiconductor dev...
- Publication number 20010024769
- Publication date Sep 27, 2001
- Kevin Donoghue
- H01 - BASIC ELECTRIC ELEMENTS

Gerald M. Cox

Person

Patents Grantslast 30 patents

Apparatus for increased workpiece throughput

Method for etching sidewall polymer and other residues from the sur...

Method for increased workpiece throughput

Remote plasma generator with sliding short tuner

Downstream sapphire elbow joint for remote plasma generator

Method and apparatus for increased workpiece throughput

Remote plasma mixer

Synchronous multiplexed near zero overhead architecture for vacuum...

Microwave choke for remote plasma generator

Synchronous multiplexed near zero overhead architecture for vacuum...

Microwave plasma discharge device

Patents Applicationslast 30 patents

Apparatus for increased workpiece throughput

Method for increased workpiece throughput

REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER

Remote plasma mixer

Downstream sapphire elbow joint for remote plasma generator

Coolant for plasma generator

Method for removing photoresist and residues from semiconductor dev...